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Flow structure and heat transfer in a stagnation flow CVD reactor / Nasir Memon in Journal of heat transfer, Vol. 133 N° 8 (Août 2011) 

Public ISBD [article]  in Journal of heat transfer > Vol. 133 N° 8 (Août 2011) . - pp. [082501/1-6] Titre : Flow structure and heat transfer in a stagnation flow CVD reactor Type de document : texte imprimé Auteurs : Nasir Memon, Auteur ; Yogesh, Jaluria, Auteur Année de publication : 2011 Article en page(s) : pp. [082501/1-6] Note générale : Physique Langues : Anglais (eng) Mots-clés : CVD  Stagnation  flow  Chemical  vapor  deposition  Buoyancy  effects Index. décimale : 536 Chaleur. Thermodynamique Résumé : An experimental study is undertaken to investigate the flow structure and heat transfer in a stagnation flow chemical vapor deposition (CVD) reactor at atmospheric pressure. It is critical to develop models that predict flow patterns in such a reactor to achieve uniform deposition across the substrate. Free convection can negatively affect the gas flow as cold inlet gas impinges on the heated substrate, leading to vortices and disturbances in the normal flow path. This experimental research will be used to understand the buoyancy-induced and momentum driven flow structure encountered in an impinging jet CVD reactor. Investigations are conducted for various operating and design parameters. A modified stagnation flow reactor is built where the height between the inlet and substrate is reduced when compared with a prototypical stagnation flow reactor. By operating such a reactor at certain Reynolds and Grashof numbers, it is feasible to sustain smooth and vortex free flow at atmospheric pressure. The modified stagnation flow reactor is compared with other stagnation flow geometries with either a varied inlet length or varied heights between the inlet and substrate. Comparisons are made to understand the impact of such geometric changes on the flow structure and the thermal boundary layer. In addition, heat transfer correlations are obtained for the substrate temperature. Overall, the results obtained provide guidelines for curbing the effects of buoyancy and for improving the flow field to obtain greater film uniformity when operating a stagnation flow CVD reactor at atmospheric pressure. DEWEY : 536 ISSN : 0022-1481 En ligne : http://asmedl.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JHTRAO00013300 [...] [article] Flow structure and heat transfer in a stagnation flow CVD reactor [texte imprimé] / Nasir Memon, Auteur ; Yogesh, Jaluria, Auteur . - 2011 . - pp. [082501/1-6]. Physique Langues : Anglais (eng) in Journal of heat transfer > Vol. 133 N° 8 (Août 2011) . - pp. [082501/1-6] Mots-clés : CVD  Stagnation  flow  Chemical  vapor  deposition  Buoyancy  effects Index. décimale : 536 Chaleur. Thermodynamique Résumé : An experimental study is undertaken to investigate the flow structure and heat transfer in a stagnation flow chemical vapor deposition (CVD) reactor at atmospheric pressure. It is critical to develop models that predict flow patterns in such a reactor to achieve uniform deposition across the substrate. Free convection can negatively affect the gas flow as cold inlet gas impinges on the heated substrate, leading to vortices and disturbances in the normal flow path. This experimental research will be used to understand the buoyancy-induced and momentum driven flow structure encountered in an impinging jet CVD reactor. Investigations are conducted for various operating and design parameters. A modified stagnation flow reactor is built where the height between the inlet and substrate is reduced when compared with a prototypical stagnation flow reactor. By operating such a reactor at certain Reynolds and Grashof numbers, it is feasible to sustain smooth and vortex free flow at atmospheric pressure. The modified stagnation flow reactor is compared with other stagnation flow geometries with either a varied inlet length or varied heights between the inlet and substrate. Comparisons are made to understand the impact of such geometric changes on the flow structure and the thermal boundary layer. In addition, heat transfer correlations are obtained for the substrate temperature. Overall, the results obtained provide guidelines for curbing the effects of buoyancy and for improving the flow field to obtain greater film uniformity when operating a stagnation flow CVD reactor at atmospheric pressure. DEWEY : 536 ISSN : 0022-1481 En ligne : http://asmedl.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JHTRAO00013300 [...]

A review of microscale transport in the thermal processing of new and emerging advanced materials / Yogesh, Jaluria in Journal of heat transfer, Vol. 133 N° 6 (Juin 2011) 

Public ISBD [article]  in Journal of heat transfer > Vol. 133 N° 6 (Juin 2011) . - pp. [060906/1-14] Titre : A review of microscale transport in the thermal processing of new and emerging advanced materials Type de document : texte imprimé Auteurs : Yogesh, Jaluria, Auteur ; Jing Yang, Auteur Année de publication : 2011 Article en page(s) : pp. [060906/1-14] Note générale : Physique Langues : Anglais (eng) Mots-clés : Microscale  transport  Materials  processing  Thermal  processing  Advanced  materials Index. décimale : 536 Chaleur. Thermodynamique Résumé : This paper reviews the microscale transport processes that arise in the fabrication of advanced materials. In many cases, the dimensions of the device being fabricated are in the micrometer length scale and, in others, underlying transformations that determine product quality and characteristics are at micro- or nanoscale levels. The basic considerations in these transport phenomena are outlined. A few important materials processing circumstances are considered in detail. These include the fabrication of multilayer and hollow optical fibers, as well as those where micro- and nanoscale dopants are added to achieve desired optical characteristics, thin film fabrication by chemical vapor deposition, and microscale coating of fibers and devices. It is shown that major challenges are posed by the simulation and experimentation, as compared with those for engineering or macroscale dimensions. These include accurate simulation to capture large gradients and variations over relatively small dimensions, simulating high pressures and viscous dissipation effects in microchannels, modeling effects such as surface tension that become dominant at microscale dimensions, and coupling micro- and nanoscale mechanisms with boundary conditions imposed at the macroscale. Similarly, measurements over microscale dimensions are much more involved than those over macro- or industrial scales because of difficult access to the regions of interest, relatively small effects such as tension, buoyancy effects, viscous rupture, bubble entrapment, and other mechanisms that are difficult to measure and that can make the process infeasible. It thus becomes difficult to achieve desired accuracy for validating the mathematical and numerical models. This paper reviews some of the approaches that have been adopted to overcome these difficulties. Comparisons between experimental and numerical results are included to show fairly good agreement, indicating the validity of the modeling of transport. DEWEY : 536 ISSN : 0022-1481 En ligne : http://asmedl.aip.org/vsearch/servlet/VerityServlet?KEY=JHTRAO&ONLINE=YES&smode= [...] [article] A review of microscale transport in the thermal processing of new and emerging advanced materials [texte imprimé] / Yogesh, Jaluria, Auteur ; Jing Yang, Auteur . - 2011 . - pp. [060906/1-14]. Physique Langues : Anglais (eng) in Journal of heat transfer > Vol. 133 N° 6 (Juin 2011) . - pp. [060906/1-14] Mots-clés : Microscale  transport  Materials  processing  Thermal  processing  Advanced  materials Index. décimale : 536 Chaleur. Thermodynamique Résumé : This paper reviews the microscale transport processes that arise in the fabrication of advanced materials. In many cases, the dimensions of the device being fabricated are in the micrometer length scale and, in others, underlying transformations that determine product quality and characteristics are at micro- or nanoscale levels. The basic considerations in these transport phenomena are outlined. A few important materials processing circumstances are considered in detail. These include the fabrication of multilayer and hollow optical fibers, as well as those where micro- and nanoscale dopants are added to achieve desired optical characteristics, thin film fabrication by chemical vapor deposition, and microscale coating of fibers and devices. It is shown that major challenges are posed by the simulation and experimentation, as compared with those for engineering or macroscale dimensions. These include accurate simulation to capture large gradients and variations over relatively small dimensions, simulating high pressures and viscous dissipation effects in microchannels, modeling effects such as surface tension that become dominant at microscale dimensions, and coupling micro- and nanoscale mechanisms with boundary conditions imposed at the macroscale. Similarly, measurements over microscale dimensions are much more involved than those over macro- or industrial scales because of difficult access to the regions of interest, relatively small effects such as tension, buoyancy effects, viscous rupture, bubble entrapment, and other mechanisms that are difficult to measure and that can make the process infeasible. It thus becomes difficult to achieve desired accuracy for validating the mathematical and numerical models. This paper reviews some of the approaches that have been adopted to overcome these difficulties. Comparisons between experimental and numerical results are included to show fairly good agreement, indicating the validity of the modeling of transport. DEWEY : 536 ISSN : 0022-1481 En ligne : http://asmedl.aip.org/vsearch/servlet/VerityServlet?KEY=JHTRAO&ONLINE=YES&smode= [...]