| Titre : | Dynamic surface profilometry and resonant-mode detection for microstructure characterization using nonconventional stroboscopic interferometry |
| Auteurs : | Chen, Liang-Chia, Auteur ; Nguyen, Xuan-Loc, Auteur ; Huang, Hsin-Sing, Auteur |
| Type de document : | Article : texte imprimé |
| Dans : | IEEE transactions on industrial electronics (Vol. 57 N° 3, Mars 2010) |
| Article en page(s) : | pp. 1120 - 1126 |
| Note générale : | Génie électrique |
| Langues : | Anglais |
| Index. décimale : | 621.38 (Dispositifs électroniques. Tubes à électrons. Photocellules. Accélérateurs de particules. Tubes à rayons X) |
| Tags : | Dynamic profilometry Microelectromechanical systems (MEMS) Resonant mode Stroboscopic interferometry |
| Résumé : | In this paper, an innovative method of automatic resonant-mode detection employing nonconventional stroboscopic interferometry is developed for nanoscale dynamic characterization of microstructures. Considering that a tested microstructure having an individual vibrating excitation source cannot be analyzed directly by the traditional stroboscopic method, an optical microscopy based on new stroboscopic interferometry was established to achieve resonant-mode detection and full-field vibratory out-of-plane surface profilometry of microstructures. To verify the effectiveness of the developed methodology, a crossbridge microbeam was measured to analyze the resonant vibratory modes and full-field dynamic-mode characterization. The experimental results confirm that the dynamic behavior of the microstructures can be accurately characterized with satisfactory mode-detection accuracy and surface profilometry. |
| DEWEY : | 621.38 |
| ISSN : | 0278-0046 |
| En ligne : | http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5340669 |
