| Titre : | A new design of a submicropositioner utilizing electromagnetic actuators and flexure mechanism |
| Auteurs : | Chen, Mei-Yung, Auteur ; Huang, Hsuan-Han, Auteur ; Hung, Shao-Kang, Auteur |
| Type de document : | Article : texte imprimé |
| Dans : | IEEE transactions on industrial electronics (Vol. 57 N° 1, Janvier 2010) |
| Article en page(s) : | pp. 96 - 106 |
| Note générale : | Génie électrique |
| Langues : | Anglais |
| Index. décimale : | 621.38 (Dispositifs électroniques. Tubes à électrons. Photocellules. Accélérateurs de particules. Tubes à rayons X) |
| Tags : | Adaptive controoler Electromagnetic actuator Fabry-Perot interferometer Modeling Motion control Optical sensor Parallel flexure mechanism Precision positioner Sliding mode controller (SMC) |
| Résumé : | In this paper, a novel XY-dimensional submicropositioner, including mechanism, control, and analysis, is successfully presented. The design of the submicropositioner utilizes a monolithic parallel flexure mechanism with built-in electromagnetic actuators and optical sensors to achieve the object of 3-DOF precise motion. From the provided experimental results, there are several main goals that have been achieved in this paper: (1) to integrate the electromagnetic actuator and the parallel flexure mechanism for planar positioning system; (2) to establish the mathematical modeling; (3) to develop an advanced adaptive sliding-mode controller; and (4) to perform extensive experiments to test the realistic performance. |
| DEWEY : | 621.38 |
| ISSN : | 0278-0046 |
| En ligne : | http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5280209 |
