| Titre : | Design and testing of a nanometer positioning system (2010) |
| Auteurs : | Lu Lihua, Auteur ; Liang Yingchun, Auteur ; Guo Yongfeng, Auteur |
| Type de document : | Article : texte imprimé |
| Dans : | Transactions of the ASME . Journal of dynamic systems, measurement, and control (Vol. 132 N° 2, Mars/Avril 2010) |
| Article en page(s) : | 06 p. |
| Note générale : | Systèmes dynamiques |
| Langues : | Anglais |
| Index. décimale : | 629.8 |
| Tags : | Actuators Control system synthesis Fasteners Nanomechanics Position control Precision engineering Servomotors Three-term |
| Résumé : | This paper presents the design and implementation of a positioning system with a dc servomotor and ball-screw mechanism used to realize high-precision positioning over a wide travel range with nanometer level positioning error and near zero overshoot. Instead of the popular dual-model control strategy and friction compensation, a high-gain proportional-integral-derivative controller is used to realize a single-step point-to-point positioning. The controller parameters are obtained by placing closed-loop poles according to the macrodynamics of a ball-screw mechanism only to avoid identification of microdynamics and friction modeling. In order to suppress the overshoot caused by actuator saturation in long-stroke positioning, a trajectory planning method is applied to calculate the input of the closed-loop system. Experimental and simulation results demonstrate that single-step precision positioning responses to different size commands are achieved without producing any large overshoot. In point-to-point positioning from 100 mm down to 10 nm, the positioning error is within 2 nm and the response dynamics is satisfactory. |
| DEWEY : | 629.8 |
| ISSN : | 0022-0434 |
| En ligne : | http://asmedl.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JDSMAA000132000002021011000001&idtype=cvips&gifs=Yes&ref=no |
