Article : texte imprimé

Thermal characterization of Si3N4 thin films using transient thermoreflectance technique

Ba, Suyuan, Auteur ; Tang, Zhenan, Auteur ; Huang, Zhengxing, Auteur |

Dans IEEE transactions on industrial electronics (Vol. 56 N° 8, Août 2009)

In this paper, we measure the thermal conductivities (TCs) of Si3N4 thin films prepared by lower pressure chemical vapor deposition with thickness ranging from 37 to 200 nm. The measurements were made at room temperature using a transient therm[...]

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