| Titre : | Direct evidence for stress-induced texture evolution and grain growth of silver thin films upon thermal treatment and self-ion bombardment (2011) |
| Auteurs : | Matteo Seita, Auteur ; Christina M. Pecnik, Auteur ; Stephan Frank, Auteur |
| Type de document : | Article : texte imprimé |
| Dans : | Acta materialia (Vol. 58 N° 19, Novembre 2010) |
| Article en page(s) : | pp. 6513–6525 |
| Note générale : | Métallurgie |
| Langues : | Anglais |
| Tags : | Ion beam processing Crystal growth Thin films Abnormal grain Texture |
| Résumé : | Common failure mechanisms in microelectronics, such as electromigration, creep and fatigue, can be positively influenced by microstructure optimization. In this paper a combination of post-deposition heat treatment and self-ion bombardment is proposed as a valid candidate to gain control over the microstructure of (1 1 1) fiber textured thin silver films. Irradiation can induce a strong in-plane texture and hence lead to biaxially textured films through a process of selective grain growth. Moreover, we report microstructural stability of the irradiated regions over a wide range of temperatures (up to 600 °C), in contrast to non-irradiated portions of the film, which underwent abnormal growth of the (1 0 0) out-of-plane oriented grains, and a consequent texture change, at temperatures as low as 195 °C. The thermal stress induced in the film upon heat treatment was quantified in situ and its role in texture change elucidated. |
| DEWEY : | 669 |
| ISSN : | 1359-6454 |
| En ligne : | http://www.sciencedirect.com/science/article/pii/S1359645410005288 |
