Article : texte imprimé

Single-step, rapid low-temperature synthesis of Si quantum dots embedded in an amorphous SiC matrix in high-density reactive plasmas

Qijin Cheng, Auteur ; Shuyan Xu, Auteur ; Kostya (Ken) Ostrikov, Auteur |

Dans Acta materialia (Vol. 58 N° 2, Janvier 2010)

A simple, effective and innovative approach based on low-pressure, thermally nonequilibrium, high-density inductively coupled plasmas is proposed to rapidly synthesize Si quantum dots (QDs) embedded in an amorphous SiC (a-SiC) matrix at a low su[...]

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