Article : texte imprimé

Raman thermometry measurements and thermal simulations for MEMS bridges at pressures from 0.05 torr to 625 torr

Leslie M. Phinney, Auteur ; Justin R. Serrano, Auteur ; Edward S. Piekos, Auteur |

Dans Journal of heat transfer (Vol. 132 N° 7, Juillet 2010)

This paper reports on experimental and computational investigations into the thermal performance of microelectromechanical systems (MEMS) as a function of the pressure of the surrounding gas. High spatial resolution Raman thermometry was used to[...]

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