Auteur Tay, Arthur
Documents disponibles écrits par cet auteur (2)
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Article : texte imprimé
Tay, Arthur, Auteur ; Chua, Hui Tong, Auteur ; Wang, Yuheng, Auteur |A programmable multizone thermal-processing module is developed to achieve wafer-temperature uniformity during the thermal-cycling process in lithography. The bake and chill steps are conducted sequentially within the same module without any sub[...]
Article : texte imprimé
Tan, Kok Kiong, Auteur ; Tay, Arthur, Auteur ; Zhao Shao, Auteur |In this paper, a predictive-PID ratio control scheme is developed for multivariable processes. The Generalized predictive control based PID configuration is incorporated into various conventional ratio control schemes. Conventional parallel and [...]
