Article : texte imprimé

Dynamic surface profilometry and resonant-mode detection for microstructure characterization using nonconventional stroboscopic interferometry

Chen, Liang-Chia, Auteur ; Nguyen, Xuan-Loc, Auteur ; Huang, Hsin-Sing, Auteur |

Dans IEEE transactions on industrial electronics (Vol. 57 N° 3, Mars 2010)

In this paper, an innovative method of automatic resonant-mode detection employing nonconventional stroboscopic interferometry is developed for nanoscale dynamic characterization of microstructures. Considering that a tested microstructure havin[...]

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