Dynamic surface profilometry and resonant-mode detection for microstructure characterization using nonconventional stroboscopic interferometry / Chen, Liang-Chia in IEEE transactions on industrial electronics, Vol. 57 N° 3 (Mars 2010)  

Public ISBD [article]  inIEEE transactions on industrial electronics > Vol. 57 N° 3 (Mars 2010) . - pp. 1120 - 1126 Titre : Dynamic surface profilometry and resonant-mode detection for microstructure characterization using nonconventional stroboscopic interferometry Type de document : texte imprimé Auteurs : Chen, Liang-Chia, Auteur ; Nguyen, Xuan-Loc, Auteur ; Huang, Hsin-Sing, Auteur Article en page(s) : pp. 1120 - 1126 Note générale : Génie électrique Langues : Anglais (eng) Mots-clés : Dynamic profilometry Microelectromechanical systems (MEMS) Resonant mode Stroboscopic interferometry Index. décimale : 621.38 Dispositifs électroniques. Tubes à électrons. Photocellules. Accélérateurs de particules. Tubes à rayons X Résumé : In this paper, an innovative method of automatic resonant-mode detection employing nonconventional stroboscopic interferometry is developed for nanoscale dynamic characterization of microstructures. Considering that a tested microstructure having an individual vibrating excitation source cannot be analyzed directly by the traditional stroboscopic method, an optical microscopy based on new stroboscopic interferometry was established to achieve resonant-mode detection and full-field vibratory out-of-plane surface profilometry of microstructures. To verify the effectiveness of the developed methodology, a crossbridge microbeam was measured to analyze the resonant vibratory modes and full-field dynamic-mode characterization. The experimental results confirm that the dynamic behavior of the microstructures can be accurately characterized with satisfactory mode-detection accuracy and surface profilometry. DEWEY : 621.38 ISSN : 0278-0046 En ligne : http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5340669 [article] Dynamic surface profilometry and resonant-mode detection for microstructure characterization using nonconventional stroboscopic interferometry [texte imprimé] / Chen, Liang-Chia, Auteur ; Nguyen, Xuan-Loc, Auteur ; Huang, Hsin-Sing, Auteur . - pp. 1120 - 1126. Génie électrique Langues : Anglais (eng) in IEEE transactions on industrial electronics > Vol. 57 N° 3 (Mars 2010) . - pp. 1120 - 1126 Mots-clés : Dynamic profilometry Microelectromechanical systems (MEMS) Resonant mode Stroboscopic interferometry Index. décimale : 621.38 Dispositifs électroniques. Tubes à électrons. Photocellules. Accélérateurs de particules. Tubes à rayons X Résumé : In this paper, an innovative method of automatic resonant-mode detection employing nonconventional stroboscopic interferometry is developed for nanoscale dynamic characterization of microstructures. Considering that a tested microstructure having an individual vibrating excitation source cannot be analyzed directly by the traditional stroboscopic method, an optical microscopy based on new stroboscopic interferometry was established to achieve resonant-mode detection and full-field vibratory out-of-plane surface profilometry of microstructures. To verify the effectiveness of the developed methodology, a crossbridge microbeam was measured to analyze the resonant vibratory modes and full-field dynamic-mode characterization. The experimental results confirm that the dynamic behavior of the microstructures can be accurately characterized with satisfactory mode-detection accuracy and surface profilometry. DEWEY : 621.38 ISSN : 0278-0046 En ligne : http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5340669

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