[article]
| Titre : |
A new design of a submicropositioner utilizing electromagnetic actuators and flexure mechanism |
| Type de document : |
texte imprimé |
| Auteurs : |
Chen, Mei-Yung, Auteur ; Huang, Hsuan-Han, Auteur ; Hung, Shao-Kang, Auteur |
| Article en page(s) : |
pp. 96 - 106 |
| Note générale : |
Génie électrique |
| Langues : |
Anglais (eng) |
| Mots-clés : |
Adaptive controoler Electromagnetic actuator Fabry-Perot interferometer Modeling Motion control Optical sensor Parallel flexure mechanism Precision positioner Sliding mode controller (SMC) |
| Index. décimale : |
621.38 Dispositifs électroniques. Tubes à électrons. Photocellules. Accélérateurs de particules. Tubes à rayons X |
| Résumé : |
In this paper, a novel XY-dimensional submicropositioner, including mechanism, control, and analysis, is successfully presented. The design of the submicropositioner utilizes a monolithic parallel flexure mechanism with built-in electromagnetic actuators and optical sensors to achieve the object of 3-DOF precise motion. From the provided experimental results, there are several main goals that have been achieved in this paper: (1) to integrate the electromagnetic actuator and the parallel flexure mechanism for planar positioning system; (2) to establish the mathematical modeling; (3) to develop an advanced adaptive sliding-mode controller; and (4) to perform extensive experiments to test the realistic performance. |
| DEWEY : |
621.38 |
| ISSN : |
0278-0046 |
| En ligne : |
http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5280209 |
in IEEE transactions on industrial electronics > Vol. 57 N° 1 (Janvier 2010) . - pp. 96 - 106
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