Nonlocal thermoelastic damping in microelectromechanical resonators / Raffaele Ardito in Journal of engineering mechanics, Vol. 135 N°3 (Mars 2009)  

Public ISBD [article]  inJournal of engineering mechanics > Vol. 135 N°3 (Mars 2009) . - pp. 214-220 Titre : Nonlocal thermoelastic damping in microelectromechanical resonators Type de document : texte imprimé Auteurs : Raffaele Ardito, Auteur ; Claudia Comi, Auteur Article en page(s) : pp. 214-220 Note générale : Mécanique appliquée Langues : Anglais (eng) Mots-clés : Structural analysis Micromechanics Thermoelasticity Constitutive models Damping. Résumé : The evaluation of loss mechanisms in microscale mechanical resonators is addressed. Among various dissipation causes, thermoelastic loss is considered as a fundamental dissipation mechanism in microbeam resonators packed in a near-vacuum environment. However, the standard thermoelastic analysis is unable to interpret the size effect experimentally evidenced in resonators when the dimensions become very small, below several microns. In this paper we propose an enhanced nonlocal thermoelastic model, based on a thermodynamical formulation, which incorporates internal characteristic material lengths. Analytical results obtained with this nonlocal theory are compared with experimental results reported in the literature. It is shown how nonlocality can better interpret the observed behavior, at least in a certain range of resonators dimensions. DEWEY : 620.1 ISSN : 0733-9399 En ligne : http://ascelibrary.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JENMDT000 [...] [article] Nonlocal thermoelastic damping in microelectromechanical resonators [texte imprimé] / Raffaele Ardito, Auteur ; Claudia Comi, Auteur . - pp. 214-220. Mécanique appliquée Langues : Anglais (eng) in Journal of engineering mechanics > Vol. 135 N°3 (Mars 2009) . - pp. 214-220 Mots-clés : Structural analysis Micromechanics Thermoelasticity Constitutive models Damping. Résumé : The evaluation of loss mechanisms in microscale mechanical resonators is addressed. Among various dissipation causes, thermoelastic loss is considered as a fundamental dissipation mechanism in microbeam resonators packed in a near-vacuum environment. However, the standard thermoelastic analysis is unable to interpret the size effect experimentally evidenced in resonators when the dimensions become very small, below several microns. In this paper we propose an enhanced nonlocal thermoelastic model, based on a thermodynamical formulation, which incorporates internal characteristic material lengths. Analytical results obtained with this nonlocal theory are compared with experimental results reported in the literature. It is shown how nonlocality can better interpret the observed behavior, at least in a certain range of resonators dimensions. DEWEY : 620.1 ISSN : 0733-9399 En ligne : http://ascelibrary.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JENMDT000 [...]

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