Auteur Xinyu Zhang
Documents disponibles écrits par cet auteur (2)
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Article : texte imprimé
Xinyu Zhang, Auteur ; Gangshi Hu, Auteur ; Gerassimos Orkoulas, Auteur |This work focuses on simultaneous regulation of film thickness, surface roughness, and porosity in a multiscale model of a thin film growth process using the inlet precursor concentration as the manipulated input. Specifically, under the assumpt[...]
Article : texte imprimé
Xinyu Zhang, Auteur ; Gangshi Hu, Auteur ; Gerassimos Orkoulas, Auteur |This work focuses on the development of a multivariable model predictive controller that simultaneously regulates thin film surface roughness and mean slope to optimize light reflectance and transmittance during thin film manufacturing by manipu[...]
