| Titre : | A review of feedforward control approaches in nanopositioning for high-speed SPM (2010) |
| Auteurs : | Garrett M. Clayton, Auteur ; Szuchi Tien, Auteur ; Kam K. Leang, Auteur |
| Type de document : | Article : texte imprimé |
| Dans : | Transactions of the ASME . Journal of dynamic systems, measurement, and control (Vol. 131 N° 6, Novembre 2009) |
| Article en page(s) : | 19 p. |
| Note générale : | dynamic systems |
| Langues : | Anglais |
| Tags : | scanning probe microscopy ; errors ; feedforward control ; probes ; imaging |
| Résumé : | Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth. This article reviews inversion-based feedforward approaches used for high-speed SPMs such as optimal inversion that accounts for model uncertainty and inversion-based iterative control for repetitive applications. The article establishes connections to other existing methods such as zero-phase-error-tracking feedforward and robust feedforward. Additionally, the article reviews the use of feedforward in emerging applications such as SPM-based nanoscale combinatorial-science studies, image-based control for subnanometer-scale studies, and imaging of large soft biosamples with SPMs. |
| DEWEY : | 629.8 |
| ISSN : | 0022-0434 |
| En ligne : | http://dynamicsystems.asmedigitalcollection.asme.org/Issue.aspx?issueID=26505&direction=P |
