Defect-free nickel micropillars fabricated at a high current density by application of a supercritical carbon dioxide emulsion / Tso-Fu Mark Chang in Industrial & engineering chemistry research, Vol. 50 N° 13 (Juillet 2011)  

Public ISBD [article]  inIndustrial & engineering chemistry research > Vol. 50 N° 13 (Juillet 2011) . - pp. 8080-8085 Titre : Defect-free nickel micropillars fabricated at a high current density by application of a supercritical carbon dioxide emulsion Type de document : texte imprimé Auteurs : Tso-Fu Mark Chang, Auteur ; Toshikazu Tasaki, Auteur ; Chiemi Ishiyama, Auteur Année de publication : 2011 Article en page(s) : pp. 8080-8085 Note générale : Chimie industrielle Langues : Anglais (eng) Mots-clés : Emulsion Supercritical state Carbon dioxide Density Defect Résumé : Fast transport properties, extremely low surface tension, and nonpolar property of supercritical carbon dioxide (Sc-CO2) are the key advantages of applying Sc-CO2 in heterogeneous reaction like electroplating. Hydrogen gas bubbles have been found to be a cause of defects found in materials fabricated by electroplating. The physical limitation at the bottom of the photoresist patterns increases the difficulty for removal of hydrogen gas bubbles and diffusion of reactant species to the reaction site. Therefore, low current density is usually applied to prevent formation of defects, but it also leads to low growth rate. Fabrication of defect-free Ni micropillars at a high current density has been demonstrated by application of Sc-CO2 emulsified electrolyte in this work. The average growth rate of the Ni micropillars in this study was about 4.7 μm/min. Diameters of the electroplated Ni micropillars ranged from 50 to 125 μm. DEWEY : 660 ISSN : 0888-5885 En ligne : http://cat.inist.fr/?aModele=afficheN&cpsidt=24332134 [article] Defect-free nickel micropillars fabricated at a high current density by application of a supercritical carbon dioxide emulsion [texte imprimé] / Tso-Fu Mark Chang, Auteur ; Toshikazu Tasaki, Auteur ; Chiemi Ishiyama, Auteur . - 2011 . - pp. 8080-8085. Chimie industrielle Langues : Anglais (eng) in Industrial & engineering chemistry research > Vol. 50 N° 13 (Juillet 2011) . - pp. 8080-8085 Mots-clés : Emulsion Supercritical state Carbon dioxide Density Defect Résumé : Fast transport properties, extremely low surface tension, and nonpolar property of supercritical carbon dioxide (Sc-CO2) are the key advantages of applying Sc-CO2 in heterogeneous reaction like electroplating. Hydrogen gas bubbles have been found to be a cause of defects found in materials fabricated by electroplating. The physical limitation at the bottom of the photoresist patterns increases the difficulty for removal of hydrogen gas bubbles and diffusion of reactant species to the reaction site. Therefore, low current density is usually applied to prevent formation of defects, but it also leads to low growth rate. Fabrication of defect-free Ni micropillars at a high current density has been demonstrated by application of Sc-CO2 emulsified electrolyte in this work. The average growth rate of the Ni micropillars in this study was about 4.7 μm/min. Diameters of the electroplated Ni micropillars ranged from 50 to 125 μm. DEWEY : 660 ISSN : 0888-5885 En ligne : http://cat.inist.fr/?aModele=afficheN&cpsidt=24332134

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