| Titre : | Predictive ratio control for interacting processes (2010) |
| Auteurs : | Tan, Kok Kiong, Auteur ; Tay, Arthur, Auteur ; Zhao Shao, Auteur |
| Type de document : | Article : texte imprimé |
| Dans : | Industrial & engineering chemistry research (Vol. 48 N° 23, Décembre 2009) |
| Article en page(s) : | pp. 10515–10521 |
| Note générale : | Industrial chemistry |
| Langues : | Anglais |
| Tags : | Predictive--Ratio--Control--Interacting--Processes |
| Résumé : | In this paper, a predictive-PID ratio control scheme is developed for multivariable processes. The Generalized predictive control based PID configuration is incorporated into various conventional ratio control schemes. Conventional parallel and series ratio control cannot satisfy the stringent requirements. The proposed method is applied to the wafer temperature uniformity control in the lithography. Both simulation and experimental results show the effectiveness of the proposed predictive ratio control method. |
| ISSN : | 0888-5885 |
| En ligne : | http://pubs.acs.org/doi/abs/10.1021/ie900219u |
