Design and testing of a nanometer positioning system / Lu Lihua in Transactions of the ASME . Journal of dynamic systems, measurement, and control, Vol. 132 N° 2 (Mars/Avril 2010)  

Public ISBD [article]  inTransactions of the ASME . Journal of dynamic systems, measurement, and control > Vol. 132 N° 2 (Mars/Avril 2010) . - 06 p. Titre : Design and testing of a nanometer positioning system Type de document : texte imprimé Auteurs : Lu Lihua, Auteur ; Liang Yingchun, Auteur ; Guo Yongfeng, Auteur Année de publication : 2010 Article en page(s) : 06 p. Note générale : Systèmes dynamiques Langues : Anglais (eng) Mots-clés : Actuators Control system synthesis Fasteners Nanomechanics Position control Precision engineering Servomotors Three-term Index. décimale : 629.8 Résumé : This paper presents the design and implementation of a positioning system with a dc servomotor and ball-screw mechanism used to realize high-precision positioning over a wide travel range with nanometer level positioning error and near zero overshoot. Instead of the popular dual-model control strategy and friction compensation, a high-gain proportional-integral-derivative controller is used to realize a single-step point-to-point positioning. The controller parameters are obtained by placing closed-loop poles according to the macrodynamics of a ball-screw mechanism only to avoid identification of microdynamics and friction modeling. In order to suppress the overshoot caused by actuator saturation in long-stroke positioning, a trajectory planning method is applied to calculate the input of the closed-loop system. Experimental and simulation results demonstrate that single-step precision positioning responses to different size commands are achieved without producing any large overshoot. In point-to-point positioning from 100 mm down to 10 nm, the positioning error is within 2 nm and the response dynamics is satisfactory. DEWEY : 629.8 ISSN : 0022-0434 En ligne : http://asmedl.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JDSMAA00013200 [...] [article] Design and testing of a nanometer positioning system [texte imprimé] / Lu Lihua, Auteur ; Liang Yingchun, Auteur ; Guo Yongfeng, Auteur . - 2010 . - 06 p. Systèmes dynamiques Langues : Anglais (eng) in Transactions of the ASME . Journal of dynamic systems, measurement, and control > Vol. 132 N° 2 (Mars/Avril 2010) . - 06 p. Mots-clés : Actuators Control system synthesis Fasteners Nanomechanics Position control Precision engineering Servomotors Three-term Index. décimale : 629.8 Résumé : This paper presents the design and implementation of a positioning system with a dc servomotor and ball-screw mechanism used to realize high-precision positioning over a wide travel range with nanometer level positioning error and near zero overshoot. Instead of the popular dual-model control strategy and friction compensation, a high-gain proportional-integral-derivative controller is used to realize a single-step point-to-point positioning. The controller parameters are obtained by placing closed-loop poles according to the macrodynamics of a ball-screw mechanism only to avoid identification of microdynamics and friction modeling. In order to suppress the overshoot caused by actuator saturation in long-stroke positioning, a trajectory planning method is applied to calculate the input of the closed-loop system. Experimental and simulation results demonstrate that single-step precision positioning responses to different size commands are achieved without producing any large overshoot. In point-to-point positioning from 100 mm down to 10 nm, the positioning error is within 2 nm and the response dynamics is satisfactory. DEWEY : 629.8 ISSN : 0022-0434 En ligne : http://asmedl.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JDSMAA00013200 [...]

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