| Titre : | A low-cost hands-on laboratory to introduce lithography concepts (2013) |
| Auteurs : | Maryam Jalali, Auteur ; James J. Marti, Auteur ; Allison L. Kirchhoff, Auteur |
| Type de document : | Article : texte imprimé |
| Dans : | IEEE transactions on education (Vol. 55 N° 4, Novembre 2012) |
| Article en page(s) : | pp. 517 - 524 |
| Note générale : | Education |
| Langues : | Anglais |
| Tags : | Hot embossing Lithography Microelectromechanical systems (MEMS) Microfabrication Microimprint |
| Résumé : | A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithography without using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools. |
| ISSN : | 0018-9359 |
| En ligne : | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6184351&sortType%3Dasc_p_Sequence%26filter%3DAND%28p_IS_Number%3A6341131%29 |
