Reducing cross-coupling in a compliant XY nanopositioner for fast and accurate raster scanning / Yuen Kuan Yong in IEEE Transactions on control systems technology, Vol. 18 N° 5 (Septembre 2010)  

Public ISBD [article]  inIEEE Transactions on control systems technology > Vol. 18 N° 5 (Septembre 2010) . - pp. 1172-1179 Titre : Reducing cross-coupling in a compliant XY nanopositioner for fast and accurate raster scanning Type de document : texte imprimé Auteurs : Yuen Kuan Yong, Auteur ; Kexiu Liu, Auteur ; S.O. Rezza Moheimani, Auteur Année de publication : 2011 Article en page(s) : pp. 1172-1179 Note générale : Génie Aérosapatial Langues : Anglais (eng) Mots-clés : Compliant XY nanopositioner Cross-coupling H-intinity control High-speed scans Raster scanning Index. décimale : 629.1 Résumé : A compliant XY nanopositioner is presented in this brief. The device is designed to have a very low cross-coupling between the X- and Y-axis. Despite this, during high-speed raster scans, the cross-coupling effect can not be ignored. In this brief, a H∞ controller is designed and implemented to minimize the X-to- Y cross-coupling of the nanoscale positioning stage, particularly at its mechanical resonance frequencies. The controller is augmented with integral action to achieve accurate tracking, as well as sufficient damping. Raster scan results over an area of 10 μm × 10 μm with small positioning errors are demonstrated. High-speed accurate raster scans of up to 100 Hz, with nanoscale resolution are also illustrated. DEWEY : 629.1 ISSN : 1063-6536 En ligne : http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5288545 [article] Reducing cross-coupling in a compliant XY nanopositioner for fast and accurate raster scanning [texte imprimé] / Yuen Kuan Yong, Auteur ; Kexiu Liu, Auteur ; S.O. Rezza Moheimani, Auteur . - 2011 . - pp. 1172-1179. Génie Aérosapatial Langues : Anglais (eng) in IEEE Transactions on control systems technology > Vol. 18 N° 5 (Septembre 2010) . - pp. 1172-1179 Mots-clés : Compliant XY nanopositioner Cross-coupling H-intinity control High-speed scans Raster scanning Index. décimale : 629.1 Résumé : A compliant XY nanopositioner is presented in this brief. The device is designed to have a very low cross-coupling between the X- and Y-axis. Despite this, during high-speed raster scans, the cross-coupling effect can not be ignored. In this brief, a H∞ controller is designed and implemented to minimize the X-to- Y cross-coupling of the nanoscale positioning stage, particularly at its mechanical resonance frequencies. The controller is augmented with integral action to achieve accurate tracking, as well as sufficient damping. Raster scan results over an area of 10 μm × 10 μm with small positioning errors are demonstrated. High-speed accurate raster scans of up to 100 Hz, with nanoscale resolution are also illustrated. DEWEY : 629.1 ISSN : 1063-6536 En ligne : http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5288545

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