Article : texte imprimé

Fault diagnosis of MEMS lateral comb resonators using multiple-model adaptive estimators

Afshin Izadian, Auteur ; Parviz Famouri, Auteur |

Dans IEEE Transactions on control systems technology (Vol. 18 N° 5, Septembre 2010)

In this brief a fault diagnostic unit is developed for microelectromechanical systems (MEMS) by means of multiple model adaptive estimation technique. Fault modeling tools such as contamination and reliability analysis of microelectromechanical [...]

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