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Fault diagnosis of MEMS lateral comb resonators using multiple-model adaptive estimators / Afshin Izadian in IEEE Transactions on control systems technology, Vol. 18 N° 5 (Septembre 2010) 

Public ISBD [article]  in IEEE Transactions on control systems technology > Vol. 18 N° 5 (Septembre 2010) . - pp. 1233-1240 Titre : Fault diagnosis of MEMS lateral comb resonators using multiple-model adaptive estimators Type de document : texte imprimé Auteurs : Afshin Izadian, Auteur ; Parviz Famouri, Auteur Année de publication : 2011 Article en page(s) : pp. 1233-1240 Note générale : Génie Aérospatial Langues : Anglais (eng) Mots-clés : Adaptive  estimators  Fault  diagnosis  Kalman  filtering  Lateral  comb  resonators  (LCRs) Index. décimale : 629.1 Résumé : In this brief a fault diagnostic unit is developed for microelectromechanical systems (MEMS) by means of multiple model adaptive estimation technique. Fault modeling tools such as contamination and reliability analysis of microelectromechanical layout enabled interpretation of microsystems behavior by evaluating their structural variations and modeling them in form of electric circuits. This technique cannot directly diagnose the faults during operation of microsystems. However, these fault-representing models can be used in multiple model adaptive estimation technique to form fault diagnosis units. Here, fault-representing systems are modeled by Kalman filters in real-time applications and are used to evaluate the fault in microsystems. MEMS lateral comb resonators are fabricated to experimentally demonstrate the fault diagnosis performance in multiple model adaptive estimation technique. DEWEY : 629.1 ISSN : 1063-6536 En ligne : http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5406017 [article] Fault diagnosis of MEMS lateral comb resonators using multiple-model adaptive estimators [texte imprimé] / Afshin Izadian, Auteur ; Parviz Famouri, Auteur . - 2011 . - pp. 1233-1240. Génie Aérospatial Langues : Anglais (eng) in IEEE Transactions on control systems technology > Vol. 18 N° 5 (Septembre 2010) . - pp. 1233-1240 Mots-clés : Adaptive  estimators  Fault  diagnosis  Kalman  filtering  Lateral  comb  resonators  (LCRs) Index. décimale : 629.1 Résumé : In this brief a fault diagnostic unit is developed for microelectromechanical systems (MEMS) by means of multiple model adaptive estimation technique. Fault modeling tools such as contamination and reliability analysis of microelectromechanical layout enabled interpretation of microsystems behavior by evaluating their structural variations and modeling them in form of electric circuits. This technique cannot directly diagnose the faults during operation of microsystems. However, these fault-representing models can be used in multiple model adaptive estimation technique to form fault diagnosis units. Here, fault-representing systems are modeled by Kalman filters in real-time applications and are used to evaluate the fault in microsystems. MEMS lateral comb resonators are fabricated to experimentally demonstrate the fault diagnosis performance in multiple model adaptive estimation technique. DEWEY : 629.1 ISSN : 1063-6536 En ligne : http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5406017