Auteur Hsin - Yan Lu
Documents disponibles écrits par cet auteur (2)
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Article : texte imprimé
Hsin - Yan Lu, Auteur ; Chin - Lin Teng, Auteur ; Chun-Wei Yu, Auteur |A mesoporous pure-silica-zeolite (PSZ) MFI low dielectric (k) film with smooth surface morphology was successfully synthesized using a centrifuged coating solution composed of a solution with PSZ MFI nanoparticles and surfactant Tween 80. The ze[...]
Article : texte imprimé
Hsin - Yan Lu, Auteur ; Chin - Lin Teng, Auteur ; Chien - Hao Kung, Auteur |The coating solutions composed of surfactant Tween 80 and noncrystalline silica particles with an average size of 4.6 nm were synthesized through a short hydrothermal process. They were spun onto silicon wafers to obtain mesoporous low-k films. [...]
