Article : texte imprimé

Preparing mesoporous low - k films with high mechanical strength from noncrystalline silica particles

Hsin - Yan Lu, Auteur ; Chin - Lin Teng, Auteur ; Chien - Hao Kung, Auteur |

Dans Industrial & engineering chemistry research (Vol. 50 N° 6, Mars 2011)

The coating solutions composed of surfactant Tween 80 and noncrystalline silica particles with an average size of 4.6 nm were synthesized through a short hydrothermal process. They were spun onto silicon wafers to obtain mesoporous low-k films. [...]

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