Capacity planning with sequential time constraints under various control policies in the back-end of wafer fabrications / Ying-Mei Tu in Journal of the operational research society (JORS), Vol. 61 N° 8 (Août 2010)  

Public ISBD [article]  inJournal of the operational research society (JORS) > Vol. 61 N° 8 (Août 2010) . - pp. 1258–1264 Titre : Capacity planning with sequential time constraints under various control policies in the back-end of wafer fabrications Type de document : texte imprimé Auteurs : Ying-Mei Tu, Auteur ; Hsin-Nan Chen, Auteur Année de publication : 2011 Article en page(s) : pp. 1258–1264 Note générale : Recherche opérationnelle Langues : Anglais (eng) Mots-clés : Capacity planning Sequential time constraints Queuing model Simulation Wafer fabrication Index. décimale : 001.424 Résumé : To ensure final product yield, engineers have to set up queue time limits for particular sequential machines during wafer processing; we name these as ‘sequential time constraints’ (STCs). This issue can be observed at the back-end of the copper interconnect process. Moreover, wafers can only be scrapped or given a mark, but cannot be reworked, when queue time limits are exceeded at these stages. To eradicate difficulties with STCs, capacity planning must be addressed. This study presents a capacity determination model employing the GI/G/m queuing model to eliminate the difficulties caused by STCs. The probability that waiting time exceeds queue time constraints under a certain capacity level can be calculated by proposed model. Hence, we can get the required capacity that can achieve the probability target set in advance. Furthermore, the inferences of different control policies on capacity planning are discussed. The proposed model is also adjusted to calculate the effects and determine required capacity under various policies. The simulation experiments support that the proposed could resolve the issues of STCs effectively. Moreover, under various control rules, the experiments results indicate that different capacity level may not be required, but varied performance will be performed. DEWEY : 001.424 ISSN : 0361-5682 En ligne : http://www.palgrave-journals.com/jors/journal/v61/n8/abs/jors200936a.html [article] Capacity planning with sequential time constraints under various control policies in the back-end of wafer fabrications [texte imprimé] / Ying-Mei Tu, Auteur ; Hsin-Nan Chen, Auteur . - 2011 . - pp. 1258–1264. Recherche opérationnelle Langues : Anglais (eng) in Journal of the operational research society (JORS) > Vol. 61 N° 8 (Août 2010) . - pp. 1258–1264 Mots-clés : Capacity planning Sequential time constraints Queuing model Simulation Wafer fabrication Index. décimale : 001.424 Résumé : To ensure final product yield, engineers have to set up queue time limits for particular sequential machines during wafer processing; we name these as ‘sequential time constraints’ (STCs). This issue can be observed at the back-end of the copper interconnect process. Moreover, wafers can only be scrapped or given a mark, but cannot be reworked, when queue time limits are exceeded at these stages. To eradicate difficulties with STCs, capacity planning must be addressed. This study presents a capacity determination model employing the GI/G/m queuing model to eliminate the difficulties caused by STCs. The probability that waiting time exceeds queue time constraints under a certain capacity level can be calculated by proposed model. Hence, we can get the required capacity that can achieve the probability target set in advance. Furthermore, the inferences of different control policies on capacity planning are discussed. The proposed model is also adjusted to calculate the effects and determine required capacity under various policies. The simulation experiments support that the proposed could resolve the issues of STCs effectively. Moreover, under various control rules, the experiments results indicate that different capacity level may not be required, but varied performance will be performed. DEWEY : 001.424 ISSN : 0361-5682 En ligne : http://www.palgrave-journals.com/jors/journal/v61/n8/abs/jors200936a.html

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