Article : texte imprimé

Wavelength-tunable blue photoluminescence of <2 nm Si nanocrystal synthesized by ultra-low-flow-density PECVD

Chung-Hsiang Chang, Auteur ; Yi-Hao Pai, Auteur ; Jr-Hau He, Auteur |

Dans Acta materialia (Vol. 58 N° 4, Fevrier 2010)

Strong blue photoluminescence (PL) spectra from Si nanocrystals (Si-ncs) embedded in Si-rich SiOx grown by PECVD at ultra-low N2O flow density and N2O/SiH4 flow ratios are characterized. The N2O flow density is kept as low as 25 sccm to restrict[...]

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