Response measurement accuracy for off-resonance excitation in atomic force microscopy / R. Parker Eason in Transactions of the ASME . Journal of dynamic systems, measurement, and control, Vol. 134 N° 1 (Janvier 2012)  

Public ISBD [article]  inTransactions of the ASME . Journal of dynamic systems, measurement, and control > Vol. 134 N° 1 (Janvier 2012) . - 09 p. Titre : Response measurement accuracy for off-resonance excitation in atomic force microscopy Type de document : texte imprimé Auteurs : R. Parker Eason, Auteur ; Andrew J. Dick, Auteur Année de publication : 2012 Article en page(s) : 09 p. Note générale : Dynamic systems Langues : Anglais (eng) Mots-clés : Atomic force microscopy Calibration Displacement measurement Numerical analysis Index. décimale : 553 Géologie économique. Minérographie. Minéraux. Formation et gisements de minerais Résumé : Displacement measurement in atomic force microscopy (AFM) is most commonly obtained indirectly by measuring the slope of the AFM probe and applying a calibration factor. Static calibration techniques operate on the assumption that the probe response approximates single mode behavior. For off-resonance excitation or different operating conditions the contribution of higher modes may become significant. In this paper, changes to the calibrated slope-displacement relationship and the corresponding implications on measurement accuracy are investigated. A model is developed and numerical simulations are performed to examine the effect of laser spot position, tip mass, quality factor and excitation frequency on measurement accuracy. Free response conditions and operation under nonlinear tip-sample forces are considered. Results are verified experimentally using a representative macroscale system. A laser spot positioned at a nominal position between x = 0.5 and 0.6 is determined to minimize optical lever measurement error under conditions where the response is dominated by contributions from the first two modes, due to excitation as well as other factors. DEWEY : 553 ISSN : 0022-0434 En ligne : http://asmedl.org/getabs/servlet/GetabsServlet?prog=normal&id=JDSMAA000134000001 [...] [article] Response measurement accuracy for off-resonance excitation in atomic force microscopy [texte imprimé] / R. Parker Eason, Auteur ; Andrew J. Dick, Auteur . - 2012 . - 09 p. Dynamic systems Langues : Anglais (eng) in Transactions of the ASME . Journal of dynamic systems, measurement, and control > Vol. 134 N° 1 (Janvier 2012) . - 09 p. Mots-clés : Atomic force microscopy Calibration Displacement measurement Numerical analysis Index. décimale : 553 Géologie économique. Minérographie. Minéraux. Formation et gisements de minerais Résumé : Displacement measurement in atomic force microscopy (AFM) is most commonly obtained indirectly by measuring the slope of the AFM probe and applying a calibration factor. Static calibration techniques operate on the assumption that the probe response approximates single mode behavior. For off-resonance excitation or different operating conditions the contribution of higher modes may become significant. In this paper, changes to the calibrated slope-displacement relationship and the corresponding implications on measurement accuracy are investigated. A model is developed and numerical simulations are performed to examine the effect of laser spot position, tip mass, quality factor and excitation frequency on measurement accuracy. Free response conditions and operation under nonlinear tip-sample forces are considered. Results are verified experimentally using a representative macroscale system. A laser spot positioned at a nominal position between x = 0.5 and 0.6 is determined to minimize optical lever measurement error under conditions where the response is dominated by contributions from the first two modes, due to excitation as well as other factors. DEWEY : 553 ISSN : 0022-0434 En ligne : http://asmedl.org/getabs/servlet/GetabsServlet?prog=normal&id=JDSMAA000134000001 [...]

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