Article : texte imprimé

Direct evidence for stress-induced texture evolution and grain growth of silver thin films upon thermal treatment and self-ion bombardment

Matteo Seita, Auteur ; Christina M. Pecnik, Auteur ; Stephan Frank, Auteur |

Dans Acta materialia (Vol. 58 N° 19, Novembre 2010)

Common failure mechanisms in microelectronics, such as electromigration, creep and fatigue, can be positively influenced by microstructure optimization. In this paper a combination of post-deposition heat treatment and self-ion bombardment is pr[...]

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