Direct evidence for stress-induced texture evolution and grain growth of silver thin films upon thermal treatment and self-ion bombardment / Matteo Seita in Acta materialia, Vol. 58 N° 19 (Novembre 2010)  

Public ISBD [article]  inActa materialia > Vol. 58 N° 19 (Novembre 2010) . - pp. 6513–6525 Titre : Direct evidence for stress-induced texture evolution and grain growth of silver thin films upon thermal treatment and self-ion bombardment Type de document : texte imprimé Auteurs : Matteo Seita, Auteur ; Christina M. Pecnik, Auteur ; Stephan Frank, Auteur Année de publication : 2011 Article en page(s) : pp. 6513–6525 Note générale : Métallurgie Langues : Anglais (eng) Mots-clés : Ion beam processing Crystal growth Thin films Abnormal grain Texture Résumé : Common failure mechanisms in microelectronics, such as electromigration, creep and fatigue, can be positively influenced by microstructure optimization. In this paper a combination of post-deposition heat treatment and self-ion bombardment is proposed as a valid candidate to gain control over the microstructure of (1 1 1) fiber textured thin silver films. Irradiation can induce a strong in-plane texture and hence lead to biaxially textured films through a process of selective grain growth. Moreover, we report microstructural stability of the irradiated regions over a wide range of temperatures (up to 600 °C), in contrast to non-irradiated portions of the film, which underwent abnormal growth of the (1 0 0) out-of-plane oriented grains, and a consequent texture change, at temperatures as low as 195 °C. The thermal stress induced in the film upon heat treatment was quantified in situ and its role in texture change elucidated. DEWEY : 669 ISSN : 1359-6454 En ligne : http://www.sciencedirect.com/science/article/pii/S1359645410005288 [article] Direct evidence for stress-induced texture evolution and grain growth of silver thin films upon thermal treatment and self-ion bombardment [texte imprimé] / Matteo Seita, Auteur ; Christina M. Pecnik, Auteur ; Stephan Frank, Auteur . - 2011 . - pp. 6513–6525. Métallurgie Langues : Anglais (eng) in Acta materialia > Vol. 58 N° 19 (Novembre 2010) . - pp. 6513–6525 Mots-clés : Ion beam processing Crystal growth Thin films Abnormal grain Texture Résumé : Common failure mechanisms in microelectronics, such as electromigration, creep and fatigue, can be positively influenced by microstructure optimization. In this paper a combination of post-deposition heat treatment and self-ion bombardment is proposed as a valid candidate to gain control over the microstructure of (1 1 1) fiber textured thin silver films. Irradiation can induce a strong in-plane texture and hence lead to biaxially textured films through a process of selective grain growth. Moreover, we report microstructural stability of the irradiated regions over a wide range of temperatures (up to 600 °C), in contrast to non-irradiated portions of the film, which underwent abnormal growth of the (1 0 0) out-of-plane oriented grains, and a consequent texture change, at temperatures as low as 195 °C. The thermal stress induced in the film upon heat treatment was quantified in situ and its role in texture change elucidated. DEWEY : 669 ISSN : 1359-6454 En ligne : http://www.sciencedirect.com/science/article/pii/S1359645410005288

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