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Fabrication and experimental characterization of nanochannels / Vinh-Nguyen Phan in Journal of heat transfer, Vol. 134 N° 5 (Mai 2012) 

Public ISBD [article]  in Journal of heat transfer > Vol. 134 N° 5 (Mai 2012) . - 06 p. Titre : Fabrication and experimental characterization of nanochannels Type de document : texte imprimé Auteurs : Vinh-Nguyen Phan, Auteur ; Nam-Trung Nguyen, Auteur ; Chun Yang, Auteur Année de publication : 2012 Article en page(s) : 06 p. Note générale : heat transfer Langues : Anglais (eng) Mots-clés : nanofluidics;  nanochannels;  micromachining;  RIE;  DRIE;  capillary  filling Index. décimale : 536 Chaleur. Thermodynamique Résumé : Nanofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the nanoscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nanochannels in silicon and glass. Since the lateral dimension of the channels is limited by the wavelength of UV light used in photolithography, the channel width can only be fabricated in the micrometer scale. However, the depth of the channel can be controlled precisely by the etching rate of reactive ion etching (RIE). Microchannels and access holes were etched with deep reactive ion etching (DRIE). Both nanochannels and microchannels were sealed by a Pyrex glass wafer using anodic bonding. The fabricated nanochannels were characterized by capillary filling and evaporation experiments. Due to the small channel height and weak fluorescent signal, fluorescent techniques are not suitable for the characterization of the nanochannels. A long exposure time is needed because of the limited amount of fluorescent molecules inhibit the measurement of transient and dynamic processes. However, as the channel height is shorter than all visible wavelengths, the contrast in refractive indices of air and liquid allows clear visualization of nanochannels filled with liquids. Automatic image processing with matlab allows the evaluation of capillary filling in nanochannels. Interesting phenomena and discrepancies with conventional theories were observed. DEWEY : 536 ISSN : 0022-1481 En ligne : http://asmedl.org/getabs/servlet/GetabsServlet?prog=normal&id=JHTRAO000134000005 [...] [article] Fabrication and experimental characterization of nanochannels [texte imprimé] / Vinh-Nguyen Phan, Auteur ; Nam-Trung Nguyen, Auteur ; Chun Yang, Auteur . - 2012 . - 06 p. heat transfer Langues : Anglais (eng) in Journal of heat transfer > Vol. 134 N° 5 (Mai 2012) . - 06 p. Mots-clés : nanofluidics;  nanochannels;  micromachining;  RIE;  DRIE;  capillary  filling Index. décimale : 536 Chaleur. Thermodynamique Résumé : Nanofluidics is the science and technology involving a fluid flowing in or around structures with a least one dimension in the nanoscale, which is defined as the range from 1 nm to 100 nm. In this paper, we present the fabrication and characterization of nanochannels in silicon and glass. Since the lateral dimension of the channels is limited by the wavelength of UV light used in photolithography, the channel width can only be fabricated in the micrometer scale. However, the depth of the channel can be controlled precisely by the etching rate of reactive ion etching (RIE). Microchannels and access holes were etched with deep reactive ion etching (DRIE). Both nanochannels and microchannels were sealed by a Pyrex glass wafer using anodic bonding. The fabricated nanochannels were characterized by capillary filling and evaporation experiments. Due to the small channel height and weak fluorescent signal, fluorescent techniques are not suitable for the characterization of the nanochannels. A long exposure time is needed because of the limited amount of fluorescent molecules inhibit the measurement of transient and dynamic processes. However, as the channel height is shorter than all visible wavelengths, the contrast in refractive indices of air and liquid allows clear visualization of nanochannels filled with liquids. Automatic image processing with matlab allows the evaluation of capillary filling in nanochannels. Interesting phenomena and discrepancies with conventional theories were observed. DEWEY : 536 ISSN : 0022-1481 En ligne : http://asmedl.org/getabs/servlet/GetabsServlet?prog=normal&id=JHTRAO000134000005 [...]