Article : texte imprimé

Nanoscale Motion Control with a Compact Minimum-Actuator Magnetic Levitator

Gu, Jie, Auteur ; Kim, Won-Jong, Auteur ; Verma, Shobhit |

Dans Transactions of the ASME . Journal of dynamic systems, measurement, and control (Vol. 127, N° 3, Septembre 2005)

This paper presents a novel magnetically levitated (maglev) stage developed to meet the ever increasing precise positioning requirements in nanotechnology. THis magnetic levitator has 6 independent linear actuators necessary ans sufficient to ge[...]

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