[article]
| Titre : |
A review of feedforward control approaches in nanopositioning for high-speed SPM |
| Type de document : |
texte imprimé |
| Auteurs : |
Garrett M. Clayton, Auteur ; Szuchi Tien, Auteur ; Kam K. Leang, Auteur |
| Année de publication : |
2010 |
| Article en page(s) : |
19 p. |
| Note générale : |
dynamic systems |
| Langues : |
Anglais (eng) |
| Mots-clés : |
scanning probe microscopy errors feedforward control probes imaging |
| Résumé : |
Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth. This article reviews inversion-based feedforward approaches used for high-speed SPMs such as optimal inversion that accounts for model uncertainty and inversion-based iterative control for repetitive applications. The article establishes connections to other existing methods such as zero-phase-error-tracking feedforward and robust feedforward. Additionally, the article reviews the use of feedforward in emerging applications such as SPM-based nanoscale combinatorial-science studies, image-based control for subnanometer-scale studies, and imaging of large soft biosamples with SPMs. |
| DEWEY : |
629.8 |
| ISSN : |
0022-0434 |
| En ligne : |
http://dynamicsystems.asmedigitalcollection.asme.org/Issue.aspx?issueID=26505&di [...] |
in Transactions of the ASME . Journal of dynamic systems, measurement, and control > Vol. 131 N° 6 (Novembre 2009) . - 19 p.
[article] A review of feedforward control approaches in nanopositioning for high-speed SPM [texte imprimé] / Garrett M. Clayton, Auteur ; Szuchi Tien, Auteur ; Kam K. Leang, Auteur . - 2010 . - 19 p. dynamic systems Langues : Anglais ( eng) in Transactions of the ASME . Journal of dynamic systems, measurement, and control > Vol. 131 N° 6 (Novembre 2009) . - 19 p.
| Mots-clés : |
scanning probe microscopy errors feedforward control probes imaging |
| Résumé : |
Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth. This article reviews inversion-based feedforward approaches used for high-speed SPMs such as optimal inversion that accounts for model uncertainty and inversion-based iterative control for repetitive applications. The article establishes connections to other existing methods such as zero-phase-error-tracking feedforward and robust feedforward. Additionally, the article reviews the use of feedforward in emerging applications such as SPM-based nanoscale combinatorial-science studies, image-based control for subnanometer-scale studies, and imaging of large soft biosamples with SPMs. |
| DEWEY : |
629.8 |
| ISSN : |
0022-0434 |
| En ligne : |
http://dynamicsystems.asmedigitalcollection.asme.org/Issue.aspx?issueID=26505&di [...] |
|
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