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A review of feedforward control approaches in nanopositioning for high-speed SPM / Garrett M. Clayton in Transactions of the ASME . Journal of dynamic systems, measurement, and control, Vol. 131 N° 6 (Novembre 2009) 

Public ISBD [article]  in Transactions of the ASME . Journal of dynamic systems, measurement, and control > Vol. 131 N° 6 (Novembre 2009) . - 19 p. Titre : A review of feedforward control approaches in nanopositioning for high-speed SPM Type de document : texte imprimé Auteurs : Garrett M. Clayton, Auteur ; Szuchi Tien, Auteur ; Kam K. Leang, Auteur Année de publication : 2010 Article en page(s) : 19 p. Note générale : dynamic systems Langues : Anglais (eng) Mots-clés : scanning  probe  microscopy;  errors;  feedforward  control;  probes;  imaging Résumé : Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth. This article reviews inversion-based feedforward approaches used for high-speed SPMs such as optimal inversion that accounts for model uncertainty and inversion-based iterative control for repetitive applications. The article establishes connections to other existing methods such as zero-phase-error-tracking feedforward and robust feedforward. Additionally, the article reviews the use of feedforward in emerging applications such as SPM-based nanoscale combinatorial-science studies, image-based control for subnanometer-scale studies, and imaging of large soft biosamples with SPMs. DEWEY : 629.8 ISSN : 0022-0434 En ligne : http://dynamicsystems.asmedigitalcollection.asme.org/Issue.aspx?issueID=26505&di [...] [article] A review of feedforward control approaches in nanopositioning for high-speed SPM [texte imprimé] / Garrett M. Clayton, Auteur ; Szuchi Tien, Auteur ; Kam K. Leang, Auteur . - 2010 . - 19 p. dynamic systems Langues : Anglais (eng) in Transactions of the ASME . Journal of dynamic systems, measurement, and control > Vol. 131 N° 6 (Novembre 2009) . - 19 p. Mots-clés : scanning  probe  microscopy;  errors;  feedforward  control;  probes;  imaging Résumé : Control can enable high-bandwidth nanopositioning needed to increase the operating speed of scanning probe microscopes (SPMs). High-speed SPMs can substantially impact the throughput of a wide range of emerging nanosciences and nanotechnologies. In particular, inversion-based control can find the feedforward input needed to account for the positioning dynamics and, thus, achieve the required precision and bandwidth. This article reviews inversion-based feedforward approaches used for high-speed SPMs such as optimal inversion that accounts for model uncertainty and inversion-based iterative control for repetitive applications. The article establishes connections to other existing methods such as zero-phase-error-tracking feedforward and robust feedforward. Additionally, the article reviews the use of feedforward in emerging applications such as SPM-based nanoscale combinatorial-science studies, image-based control for subnanometer-scale studies, and imaging of large soft biosamples with SPMs. DEWEY : 629.8 ISSN : 0022-0434 En ligne : http://dynamicsystems.asmedigitalcollection.asme.org/Issue.aspx?issueID=26505&di [...]