Article : texte imprimé

DMCMN : in depth characterization and control of AFM cantilevers with integrated sensing and actuation

Georg E. Fantner, Auteur ; Daniel J. Burns, Auteur ; Angela M. Belcher, Auteur |

Dans Transactions of the ASME . Journal of dynamic systems, measurement, and control (Vol. 131 N° 6, Novembre 2009)

New developments in MEMS (microelectromechanical systems) fabrication allowed the development of new types of atomic force microscopy (AFM) sensor with integrated readout circuit and actuator built in on the cantilever. Such a fully instrumented[...]

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