Article : texte imprimé

Characterization of the dynamical response of a micromachined G-sensor to mechanical shock loading

Daniel Jordy, Auteur ; Younis, Mohammad I., Auteur |

Dans Transactions of the ASME . Journal of dynamic systems, measurement, and control (Vol. 130 n°4, Juillet 2008)

Squeeze film damping has a significant effect on the dynamic response of microelectromechanical system (MEMS) devices that employ perforated microstructures with large planar areas and small gap widths separating them from the substrate. Perfora[...]

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