Robust control of a parallel- kinematic nanopositioner / Jingyan Dong in Transactions of the ASME . Journal of dynamic systems, measurement, and control, Vol. 130 n°4 (Juillet 2008)  

Public ISBD [article]  inTransactions of the ASME . Journal of dynamic systems, measurement, and control > Vol. 130 n°4 (Juillet 2008) . - 15 p. Titre : Robust control of a parallel- kinematic nanopositioner Type de document : texte imprimé Auteurs : Jingyan Dong, Auteur ; Srinivasa M. Salapaka, Auteur ; Placid M. Ferreira, Auteur Année de publication : 2008 Article en page(s) : 15 p. Note générale : dynamic systems Langues : Anglais (eng) Mots-clés : control equipment  motion  transfer functions  design  robust control  piezoelectric actuators  resolution (optics)  end effectors  bending (stress)  signals  displacement  errors  mechanisms Résumé : This paper presents the design, model identification, and control of a parallel-kinematic XYZ nanopositioning stage for general nanomanipulation and nanomanufacturing applications. The stage has a low degree-of-freedom monolithic parallel-kinematic mechanism featuring single-axis flexure hinges. The stage is driven by piezoelectric actuators, and its displacement is detected by capacitance gauges. The control loop is closed at the end effector instead of at each joint, so as to avoid calibration difficulties and guarantee high positioning accuracy. This design has strongly coupled dynamics with each actuator input producing in multiaxis motions. The nanopositioner is modeled as a multiple input and multiple output (MIMO) system, where the control design forms an important constituent in view of the strongly coupled dynamics. The dynamics that model the MIMO plant is identified by frequency domain and time-domain identification methods. The control design based on modern robust control theory that gives a high bandwidth closed loop nanopositioning system, which is robust to physical model uncertainties arising from flexure-based mechanisms, is presented. The bandwidth, resolution, and repeatability are characterized experimentally, which demonstrate the effectiveness of the robust control approach. En ligne : http://dynamicsystems.asmedigitalcollection.asme.org/issue.aspx?journalid=117&is [...] [article] Robust control of a parallel- kinematic nanopositioner [texte imprimé] / Jingyan Dong, Auteur ; Srinivasa M. Salapaka, Auteur ; Placid M. Ferreira, Auteur . - 2008 . - 15 p. dynamic systems Langues : Anglais (eng) in Transactions of the ASME . Journal of dynamic systems, measurement, and control > Vol. 130 n°4 (Juillet 2008) . - 15 p. Mots-clés : control equipment  motion  transfer functions  design  robust control  piezoelectric actuators  resolution (optics)  end effectors  bending (stress)  signals  displacement  errors  mechanisms Résumé : This paper presents the design, model identification, and control of a parallel-kinematic XYZ nanopositioning stage for general nanomanipulation and nanomanufacturing applications. The stage has a low degree-of-freedom monolithic parallel-kinematic mechanism featuring single-axis flexure hinges. The stage is driven by piezoelectric actuators, and its displacement is detected by capacitance gauges. The control loop is closed at the end effector instead of at each joint, so as to avoid calibration difficulties and guarantee high positioning accuracy. This design has strongly coupled dynamics with each actuator input producing in multiaxis motions. The nanopositioner is modeled as a multiple input and multiple output (MIMO) system, where the control design forms an important constituent in view of the strongly coupled dynamics. The dynamics that model the MIMO plant is identified by frequency domain and time-domain identification methods. The control design based on modern robust control theory that gives a high bandwidth closed loop nanopositioning system, which is robust to physical model uncertainties arising from flexure-based mechanisms, is presented. The bandwidth, resolution, and repeatability are characterized experimentally, which demonstrate the effectiveness of the robust control approach. En ligne : http://dynamicsystems.asmedigitalcollection.asme.org/issue.aspx?journalid=117&is [...]

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