Article : texte imprimé

A laboratory project on the theory, fabrication, and characterization of a silicon-on-insulator micro-comb drive actuator with fixed-fixed beams

Abada, K., Auteur ; Leseman, Z.C., Auteur |

Dans IEEE transactions on education (Vol. 55 N° 1, Février 2012)

A laboratory course on the theory, fabrication, and characterization of microelectromechanical systems (MEMS) devices for a multidisciplinary audience of graduate students at the University of New Mexico, Albuquerque, has been developed. Hands-o[...]

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