Predictive ratio control for interacting processes / Tan, Kok Kiong in Industrial & engineering chemistry research, Vol. 48 N° 23 (Décembre 2009)  

Public ISBD [article]  inIndustrial & engineering chemistry research > Vol. 48 N° 23 (Décembre 2009) . - pp. 10515–10521 Titre : Predictive ratio control for interacting processes Type de document : texte imprimé Auteurs : Tan, Kok Kiong, Auteur ; Tay, Arthur, Auteur ; Zhao Shao, Auteur Année de publication : 2010 Article en page(s) : pp. 10515–10521 Note générale : Industrial chemistry Langues : Anglais (eng) Mots-clés : Predictive--Ratio--Control--Interacting--Processes Résumé : In this paper, a predictive-PID ratio control scheme is developed for multivariable processes. The Generalized predictive control based PID configuration is incorporated into various conventional ratio control schemes. Conventional parallel and series ratio control cannot satisfy the stringent requirements. The proposed method is applied to the wafer temperature uniformity control in the lithography. Both simulation and experimental results show the effectiveness of the proposed predictive ratio control method. ISSN : 0888-5885 En ligne : http://pubs.acs.org/doi/abs/10.1021/ie900219u [article] Predictive ratio control for interacting processes [texte imprimé] / Tan, Kok Kiong, Auteur ; Tay, Arthur, Auteur ; Zhao Shao, Auteur . - 2010 . - pp. 10515–10521. Industrial chemistry Langues : Anglais (eng) in Industrial & engineering chemistry research > Vol. 48 N° 23 (Décembre 2009) . - pp. 10515–10521 Mots-clés : Predictive--Ratio--Control--Interacting--Processes Résumé : In this paper, a predictive-PID ratio control scheme is developed for multivariable processes. The Generalized predictive control based PID configuration is incorporated into various conventional ratio control schemes. Conventional parallel and series ratio control cannot satisfy the stringent requirements. The proposed method is applied to the wafer temperature uniformity control in the lithography. Both simulation and experimental results show the effectiveness of the proposed predictive ratio control method. ISSN : 0888-5885 En ligne : http://pubs.acs.org/doi/abs/10.1021/ie900219u

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