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A low-cost hands-on laboratory to introduce lithography concepts / Maryam Jalali in IEEE transactions on education, Vol. 55 N° 4 (Novembre 2012) 

Public ISBD [article]  in IEEE transactions on education > Vol. 55 N° 4 (Novembre 2012) . - pp. 517 - 524 Titre : A low-cost hands-on laboratory to introduce lithography concepts Type de document : texte imprimé Auteurs : Maryam Jalali, Auteur ; James J. Marti, Auteur ; Allison L. Kirchhoff, Auteur Année de publication : 2013 Article en page(s) : pp. 517 - 524 Note générale : Education Langues : Anglais (eng) Mots-clés : Hot  embossing  Lithography  Microelectromechanical  systems  (MEMS)  Microfabrication  Microimprint Résumé : A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithography without using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools. ISSN : 0018-9359 En ligne : http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6184351&sortType%3Das [...] [article] A low-cost hands-on laboratory to introduce lithography concepts [texte imprimé] / Maryam Jalali, Auteur ; James J. Marti, Auteur ; Allison L. Kirchhoff, Auteur . - 2013 . - pp. 517 - 524. Education Langues : Anglais (eng) in IEEE transactions on education > Vol. 55 N° 4 (Novembre 2012) . - pp. 517 - 524 Mots-clés : Hot  embossing  Lithography  Microelectromechanical  systems  (MEMS)  Microfabrication  Microimprint Résumé : A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithography without using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools. ISSN : 0018-9359 En ligne : http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6184351&sortType%3Das [...]