[article]
| Titre : |
A low-cost hands-on laboratory to introduce lithography concepts |
| Type de document : |
texte imprimé |
| Auteurs : |
Maryam Jalali, Auteur ; James J. Marti, Auteur ; Allison L. Kirchhoff, Auteur |
| Année de publication : |
2013 |
| Article en page(s) : |
pp. 517 - 524 |
| Note générale : |
Education |
| Langues : |
Anglais (eng) |
| Mots-clés : |
Hot embossing Lithography Microelectromechanical systems (MEMS) Microfabrication Microimprint |
| Résumé : |
A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithography without using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools. |
| ISSN : |
0018-9359 |
| En ligne : |
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6184351&sortType%3Das [...] |
in IEEE transactions on education > Vol. 55 N° 4 (Novembre 2012) . - pp. 517 - 524
[article] A low-cost hands-on laboratory to introduce lithography concepts [texte imprimé] / Maryam Jalali, Auteur ; James J. Marti, Auteur ; Allison L. Kirchhoff, Auteur . - 2013 . - pp. 517 - 524. Education Langues : Anglais ( eng) in IEEE transactions on education > Vol. 55 N° 4 (Novembre 2012) . - pp. 517 - 524
| Mots-clés : |
Hot embossing Lithography Microelectromechanical systems (MEMS) Microfabrication Microimprint |
| Résumé : |
A lithography lab course has been developed that is applicable to students from the middle-school level up to college students. It can also be inserted into electronics technology or similar courses in two- and four-year colleges, or used to demonstrate applications of polymers in chemistry classes. Some of these techniques would enable research projects that involve photolithography for those who lack access to a research lab. The major contribution of this course is the innovative methodology, which allows students to have a hands-on experience of lithography without using expensive equipment typically found only in a clean room. Optical lithography, microcontact printing, and embossing can be performed using basic equipment. The appendix of this paper provides a comprehensive list of this equipment. The photolithography results are comparable to those obtained with standard research tools. |
| ISSN : |
0018-9359 |
| En ligne : |
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6184351&sortType%3Das [...] |
|
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