The development of instrumentation to monitor the flux densities of vapour species during the deposition of zinc sulphoselenide film material [texte imprimé] /
Mohammed Benyezzar, Auteur ;
D. King, Directeur de thèse . -
Manchester : [s.n.], 1986 . - Mult. : ill. ; 27 cm.
Master of science : Chemistry : Victoria University of Manchester : 1986
Annexe [5] f. Bibliogr. [3] f.
Langues : Anglais (
eng)
| Mots-clés : |
Vapour -- species Zinc sulphoselenide films Theory of modulated beam spectrometry |
| Index. décimale : |
M006686 |
| Résumé : |
This thesis contains a description of instrumentation developed for the study of the concentration of vapour species present during the growth of zinc sulphoselenide films on gallium arsenide substrate using molecular beam epitaxy.
It is the object of the work to provide a method for controlling the vapourization of the alloy constituents during a film deposition.
The introduction in chapter I outlines briefly the aim of the project and reviews the advantages of using mass spectrometers, the logarithmic display of ion currents in mass spectra, modulated molecular beam mass spectrometry and multisource evaporation.
The development of a logarithmic display system for the ion currents detected at the output of the electron multiplier of a quadrupole mass spectrometer is described in chapter II.
Chapter III gives a literature review of modulated molecular beam mass spectrometry.
Calibration of the mass spectrometer, beam modulation techniques and the effects of molecule transit times are outlined.
In chapter IV the instruments developed for the application of modulated molecular beam mass spectrometry to the vapourization of zinc selenide and zinc sulphoselenide compounds are described.
The influence of an already existing deposition apparatus on the mechanical design of parts for the vapour chopping system are outlined. |
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