[article]
Titre : |
A neural network and a genetic algorithm for multiobjective scheduling of semiconductor manufacturing plants |
Type de document : |
texte imprimé |
Auteurs : |
O. Baez Senties, Auteur ; C. Azzaro-Pantel, Auteur ; L. Pibouleau, Auteur |
Année de publication : |
2010 |
Article en page(s) : |
pp. 9546–9555 |
Note générale : |
Chemical engineering |
Langues : |
Anglais (eng) |
Mots-clés : |
Artificial neural network technique Multiobjective genetic algorithm Semiconductor manufacturing plants |
Résumé : |
Scheduling of semiconductor wafer fabrication system is identified as a complex problem, involving multiple objectives to be satisfied simultaneously (maximization of workstation utilization and minimization of waiting time and storage, for instance). In this study, we propose a methodology based on an artificial neural network technique, for computing the various objective functions, embedded into a multiobjective genetic algorithm for multidecision scheduling problems in a semiconductor wafer fabrication environment. A discrete event simulator, developed and validated in our previous works, serves here to feed the neural network. Six criteria related to both equipment (facility average utilization) and products (average cycle time (ACT), standard deviation of ACT, average waiting time, work in process, and total storage) are chosen as significant performance indexes of the workshop. The optimization variables are the time between campaigns and the release time of batches into the plant. An industrial size example is taken as a test bench to validate the approach. |
En ligne : |
http://pubs.acs.org/doi/abs/10.1021/ie8018577 |
in Industrial & engineering chemistry research > Vol. 48 N° 21 (Novembre 2009) . - pp. 9546–9555
[article] A neural network and a genetic algorithm for multiobjective scheduling of semiconductor manufacturing plants [texte imprimé] / O. Baez Senties, Auteur ; C. Azzaro-Pantel, Auteur ; L. Pibouleau, Auteur . - 2010 . - pp. 9546–9555. Chemical engineering Langues : Anglais ( eng) in Industrial & engineering chemistry research > Vol. 48 N° 21 (Novembre 2009) . - pp. 9546–9555
Mots-clés : |
Artificial neural network technique Multiobjective genetic algorithm Semiconductor manufacturing plants |
Résumé : |
Scheduling of semiconductor wafer fabrication system is identified as a complex problem, involving multiple objectives to be satisfied simultaneously (maximization of workstation utilization and minimization of waiting time and storage, for instance). In this study, we propose a methodology based on an artificial neural network technique, for computing the various objective functions, embedded into a multiobjective genetic algorithm for multidecision scheduling problems in a semiconductor wafer fabrication environment. A discrete event simulator, developed and validated in our previous works, serves here to feed the neural network. Six criteria related to both equipment (facility average utilization) and products (average cycle time (ACT), standard deviation of ACT, average waiting time, work in process, and total storage) are chosen as significant performance indexes of the workshop. The optimization variables are the time between campaigns and the release time of batches into the plant. An industrial size example is taken as a test bench to validate the approach. |
En ligne : |
http://pubs.acs.org/doi/abs/10.1021/ie8018577 |
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