Auteur Kobayashi, Kenzo
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Okabe, Shigemitsu, Auteur ; Koto, Masanori, Auteur ; Endo, Fumihiro ; Kobayashi, Kenzo |V-t characteristics of spacer surfaces for VFT were investigated under particle contaminated conditions. V-t characteristics for VFT were measured with the particle length, oscillation frequency, amplitude, and damping factor of VFT waveform as[...]
